初選不開放。密集課程。課程報名資訊請見https://reurl.cc/rrEXzr.

Week 1： 1.System overview 2.Mainframe configuration 3.Process module 4.Utility connection 5.Sub-system 6.Safety 7.Tool on-site inspection Week 2： 1.RF delivery system 2.Gas delivery system 3.Pressure servo system 4.ESC system 5.Backside He system 6.Temperature system 7.Chamber design evolution 8.EPD system introduction 9.Software operation overview Week 3： 1.S/W operation main platform 2.S/W operation process module 3.S/W operation data access 4.Mainframe outline 5.Mainframe service function 6.Mainframe maintenance 7.Maintenance practice and certification Week 3： Specialty 1.Chamber outline and PM preparation 2.Process kits disassembling 3.Process kits cleaning and inspection 4.Process kits installation 5.PM practice

協助學員在完成訓練後： 1.對半導體機台的設計原理、操作與預防保養有基礎的概念； 2.對半導體設備實務工作有初步的了解； 3.能結合學校所學理論與產業實務。