初選不開放。密集課程。課程報名資訊請見https://reurl.cc/rrEXzr.

Week1： Transfer (1) ●Introduction to the functions and actions of EFEM Equipment Front End Module) ●Principles of robot action and correction ●Load port Transfer (2) ●Types and evolution of FOUP (Front Opening Unified Pod) ●TSMC-Load port ●Vibration wafer sensor Week2： Gas/MFC ●MFC(Mass Flow Controller) introduction ●Gas filter ●MFC calibration implementation Chemical ●Liquid pump introduction ●Types and principles of chemical filters ●Chemical material introduction ●Chemical valve Week3： Plasma ●Principle of PlasmaFormation ●Types and principles of plasma design ●Principle of DC bias ●Application of Plasma Temperature ●Temperature effect and component types ●Chiller/ Heat-changer ●Types of Cooling chip/Coolant ●Introduction to the principle and function of ESC (Electrostatic Chuck) Week4： Specialty ●Coating techniques introduction ●OES (O ptical Emission Spectroscopy) principle and application ●e-Sensor ●Introduction to ionizer

協助學員在完成訓練後： 1.對半導體設備元件原理與作用有基礎的了解； 2.對半導體設備實務工作有初步的了解； 3.能結合學校所學理論與產業實務。