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Thin Film Materials Science

Offered in 112-2

  • Serial Number

    36744

  • Course Number

    MSE5065

  • Course Identifier

    527 U2090

  • No Class

  • 3 Credits

  • Elective

    GRADUATE INSTITUTE OF MATERIALS SCIENCE AND ENGINEERING

      Elective

    • GRADUATE INSTITUTE OF MATERIALS SCIENCE AND ENGINEERING

  • YI-CHIA CHOU
  • Wed 3, 4, 5

  • 綜603

  • Type 2

  • 20 Student Quota

    NTU 20

  • No Specialization Program

  • Chinese
  • NTU COOL
  • Notes

  • NTU Enrollment Status

    Enrolled
    0/20
    Other Depts
    0/0
    Remaining
    0
    Registered
    0
  • Course Description
    薄膜已被廣泛地應用在電子產業。由於電子元件的微縮，奈米尺度電子元件的製程技術與可靠度變得愈來愈重要。這門課會著重在介紹薄膜的製程與科學、薄膜材料的應用與可靠度、薄膜材料反應與一維奈米線的差異。
  • Course Objective
    1. 薄膜沉積 2. 薄膜材料表面能、擴散行為、應力的介紹 3. 薄膜的化學能與表面動態行為 4. 表面動力學過程 5. 交互擴散 6. 矽化物薄膜形成 7. 電遷移機制 1. Thin film deposition 2. Review of surface energy, diffusion, and stress in thin films 3. Chemical potentials and surface kinetic processes 4. Kinetic processes 5. Interdiffusion 6. Silicide formation and thin film reactions 7. Electromigration in VLSI interconnects
  • Course Requirement
    1. Introduction to materials science (材料科學導論) 2. Thermodynamics of Materials (材料熱力學)
  • Expected weekly study hours before and/or after class
    3小時
  • Office Hour
    *This office hour requires an appointment
  • Designated Reading
  • References
    Kinetics in Nanoscale Materials, King-Ning Tu and Andriy M. Gusak, Wiley Press, 201 ISBN:9780470881408
  • Grading
  • Adjustment methods for students
  • Make-up Class Information
  • Course Schedule