Serial Number
36744
Course Number
MSE5065
Course Identifier
527 U2090
No Class
- 3 Credits
Elective
GRADUATE INSTITUTE OF MATERIALS SCIENCE AND ENGINEERING
GRADUATE INSTITUTE OF MATERIALS SCIENCE AND ENGINEERING
Elective- YI-CHIA CHOU
- View Courses Offered by Instructor
COLLEGE OF ENGINEERING DEPARTMENT OF MATERIALS SCIENCE AND ENGINEERING
- Wed 3, 4, 5
Zonghe Lecture Building Rm. 603 (綜603)
Type 2
20 Student Quota
NTU 20
No Specialization Program
- Chinese
- NTU COOL
- Notes
NTU Enrollment Status
Loading...- Course Description薄膜已被廣泛地應用在電子產業。由於電子元件的微縮，奈米尺度電子元件的製程技術與可靠度變得愈來愈重要。這門課會著重在介紹薄膜的製程與科學、薄膜材料的應用與可靠度、薄膜材料反應與一維奈米線的差異。
- Course Objective1. 薄膜沉積 2. 薄膜材料表面能、擴散行為、應力的介紹 3. 薄膜的化學能與表面動態行為 4. 表面動力學過程 5. 交互擴散 6. 矽化物薄膜形成 7. 電遷移機制 1. Thin film deposition 2. Review of surface energy, diffusion, and stress in thin films 3. Chemical potentials and surface kinetic processes 4. Kinetic processes 5. Interdiffusion 6. Silicide formation and thin film reactions 7. Electromigration in VLSI interconnects
- Course Requirement1. Introduction to materials science (材料科學導論) 2. Thermodynamics of Materials (材料熱力學)
- Expected weekly study hours after class3小時
- Office Hour
*This office hour requires an appointment - Designated Reading
- ReferencesKinetics in Nanoscale Materials, King-Ning Tu and Andriy M. Gusak, Wiley Press, 201 ISBN:9780470881408
- Grading
40% 期中考
紙筆測驗
40% 期末考
紙筆測驗
20% 口頭報告
上台口頭報告
- Adjustment methods for students
- Course Schedule
2/21Week 1 2/21 1. 課程內容介紹、規劃、評分方式 2. 電子薄膜產業介紹 2/28Week 2 2/28 放假日 3/6Week 3 3/6 Thin film deposition 3/13Week 4 3/13 Thin film deposition Surface energies 3/20Week 5 3/20 Surface energies 3/27Week 6 3/27 Atomic diffusion in solids 4/3Week 7 4/3 Atomic diffusion in solids 4/10Week 8 4/10 Stress in thin films 4/17Week 9 4/17 期中紙筆測驗(期中考) 4/24Week 10 4/24 Stress in thin films 5/1Week 11 5/1 Surface kinetic processes 5/8Week 12 5/8 Surface kinetic processes 5/15Week 13 5/15 Interdiffusion 5/22Week 14 5/22 Interdiffusion 5/29Week 15 5/29 期末口頭報告 6/5Week 16 6/5 期末紙筆測驗(期末考)